What is epitaxy in IC fabrication?
Epitaxy is the process of the controlled growth of a crystalline doped layer of silicon on a single crystal substrate. Metallization and interconnections. After all semiconductor fabrication steps of a device or of an integrated circuit are. completed, it becomes necessary to provide metallic interconnections for the.
What is Autodoping?
in the manufacture of silicon epitaxial wafers, the incorporation of dopant originating from the substrate into the epitaxial layer.
What is epitaxy patterned growth?
Epitaxial growth is broadly defined as the condensation of gas precursors to form a film on a substrate. Liquid precursors are also used, although the vapor phase from molecular beams is more in use. Vapor precursors are obtained by CVD and laser ablation.
What is solid phase epitaxy?
Solid phase epitaxy (SPE) occurs when a metastable amorphous layer in contact with a single crystal template crystallizes epitaxially in the solid state by the rearrangement of atoms at the interface between the two phases [4.1].
What is Autodoping in growth process?
In addition to intentional dopants, unintentional dopants are introduced from the substrate via a process called autodoping, in which the dopant is released from the substrate through solid-state diffusion or evaporation, and is reincorporated into the growing layer either by diffusion through the interface or through …
What is epitaxy process?
Epitaxy is the process used to grow a thin crystalline layer on a crystalline substrate. In epitaxial process the substrate wafer acts s a seed crystal. Epitaxial process is differentiated from Czochralski process, in that crystal can be grown below melting point.
Does epitaxy involve single crystalline structures?
For most epitaxial growths, the new layer is usually crystalline and each crystallographic domain of the overlayer must have a well-defined orientation relative to the substrate crystal structure. Epitaxy can involve single-crystal structures, although grain-to-grain epitaxy has been observed in granular films.
What are the commercial applications of epitaxial growth?
One of the main commercial applications of epitaxial growth is in the semiconductor industry, where semiconductor films are grown epitaxially on semiconductor substrate wafers.
What type of epitaxy is used for semiconductors?
Molecular-beam and liquid-phase epitaxy (MBE and LPE) are also used, mainly for compound semiconductors. Solid-phase epitaxy is used primarily for crystal-damage healing. Silicon is most commonly deposited by doping with silicon tetrachloride and hydrogen at approximately 1200 to 1250 °C: