What is a silicide used for?

Thin-film silicide layers are used as ohmic contacts, interconnects, and as Schottky barriers for integrated circuits in microelectronic devices due to their low electrical resistivity and good compatibility with silicon substrates relative to polycrystalline silicon.

What is the main advantage of Salicide process?

These silicides have fairly low resistivity and good high-temperature-stability. The self-aligned-silicide (salicide) process is widely used in integrated circuits to reduce polysilicon gate resistance and source/drain contact resistance. The self-aligned-silicide technology possesses a number of advantages.

What is silicide formula?

Silicide(1-) | Si- – PubChem.

What is trench silicide?

The trench silicide contact structure is used to connect a semiconductor device to Back End of Line (BEOL) layers such as metal lines. The trench silicide contact structure can be formed on planar silicon, silicon fins, planar silicon with epitaxial layers, or silicon fins with epitaxial layers.

What is Silicidation in VLSI?

Silicide practices in VLSI applications Silicides have become widely used in VLSI processing in order to avoid the increase in resistance otherwise associated with reduced polysilicon linewidths and film thicknesses.

What is poly resistor?

Poly-silicon resistor is widely used as an important device in CMOS analog circuit design [1] such as band-gap, integrator or DAC. It is necessary to use an accurate model for circuit simulation in DC and AC performance.

What is silicide in semiconductor?

Silicide (compound of silicon with metal) is formed on gates (polysilicon), sources and drains (Si wafer) as three MOS transistor electrodes in order to reduce contact resistance to metal wiring layers to be formed later. This silicide formation also has the effect of lowering the resistance of each electrode.

Does sodium react with silicon?

Sodium silicide (NaSi, Na4Si4) is a binary inorganic compound consisting of sodium and silicon. It is a solid black or grey crystalline material. Sodium silicide reacts readily with water yielding gaseous hydrogen and aqueous sodium silicate in an exothermic reaction (~175 kJ·mol−1):

Is magnesium very reactive?

Halogens: When reacted with a halogen, magnesium is very reactive.

Where is silicon naturally found?

Natural abundance Silicon makes up 27.7% of the Earth’s crust by mass and is the second most abundant element (oxygen is the first). It does not occur uncombined in nature but occurs chiefly as the oxide (silica) and as silicates. The oxide includes sand, quartz, rock crystal, amethyst, agate, flint and opal.

What is silicide and salicide?

Silicide. A silicide prepared by a self-aligned process is called a salicide. This is a process in which silicide contacts are formed only in those areas in which deposited metal (which after annealing becomes a metal component of the silicide) is in direct contact with silicon, hence, the process is self-aligned.

What is unsourced salicide?

Unsourced material may be challenged and removed. The term salicide refers to a technology used in the microelectronics industry used to form electrical contacts between the semiconductor device and the supporting interconnect structure.

What are the key scaling issues affecting all salicides?

A key scaling issue affecting all salicides is the tradeoff between sheet resistance, which requires thicker salicide films to achieve lower values, and silicon consumption, which requires thinner silicide films as junction depths and, to a lesser extent, gate thickness are scaled down.

What is the diffusity of Si in silicides?

Silicides are polycrystalline by nature with large density of grain boundaries. There are a lrge number of defects in grain boundaries. As a result the diffusity in silicides is very high. Dopant from Si can readily redistribute into a silicide.